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Resistance Measuring Instrument(resistance) - List of Manufacturers, Suppliers, Companies and Products

Resistance Measuring Instrument Product List

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Fully Automatic Expansion Resistance Measurement Device SRP2000

Fully Automatic Expansion Resistance Measurement Device SRP2000

Fully automatic spreading resistance measurement device

The SRP (Spreading Resistance Profiler) device measures the resistivity profile of silicon in the depth direction, the thickness of the EPI layer, the depth of the PN junction, and the carrier concentration distribution by making contact with two probes on a diagonally polished silicon wafer in the depth direction and measuring the spreading resistance value between the probes.

  • Other inspection equipment and devices

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[SRA] Spread Resistance Measurement Method

[SRA] Spread Resistance Measurement Method

SRA：Spreading Resistance Analysis

SRA is a method that involves diagonally polishing the measurement sample, making contact with two probes on the polished surface, and measuring the spreading resistance. It is also referred to as SRP (Spreading Resistance Profiling). - It is possible to determine the conductivity type (p-type/n-type). - It allows for the evaluation of carrier concentration distribution in the depth direction. - It can analyze a wide range of carrier concentrations from approximately 1E12 to 2E20 /cm3. - It is capable of measuring patterned samples larger than approximately 20μm × 100μm. - By combining SRA with SIMS for evaluation, it is possible to assess the activation rate.

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  • Contract Analysis
  • Contract measurement
  • Contract Inspection

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